SpinBall Spin Station:
We provide the track products in the following areas:
The SpinBall Spin Station is a small, manually-loaded tool designed for the spin deposition of photoresist, developer, polymer and other materials common to integrated circuit photolithography. Built using the same proven technology of our production-grade Tractrix™ spin track, the SpinBall spin tool contains many of the same advanced components and automatic capabilities.
The SpinBall tool retains many Tractrix-style key features such as the advanced spin module, hot plate, and Windows®-based easy-to-use control software. It's all packaged in an economical, manually-loaded, single-wafer system.
The SpinBall tool is flexible. It can contain just a spin module with all wafer load/unload and dispenses performed manually by the operator. Likewise, it can be configured to automatically dispense, spin, bake and chill completely under program control. You decide.
The tool will handle substrates sized from 2” to 300mm and is perfect for compound semiconductor applications and R&D.
We provide “ESVG” (Enhanced SVG) 81- & 86-series track equipment. ESVG is your guarantee this SVG system includes the best of our designed and manufactured upgrades. Our ESVG products include enhanced: coater cup, drains, hot plate modules, sensors, electronic controls and more.
ESVG 81 & 86 Systems
We can provide rebuilt 8126, 8132, 8626, or 8632 series systems in our Santa Clara factory. Or, if you have a used or worn-out system, we can regenerate (refurbish and upgrade) it for you.
