Cartridge Dispense System (CDS)
Product Description
Cartridge Dispense System (CDS) :
We provide the track products in the following areas:
The CDS capabilities include:
- Dispenses most lithographic chemistries in both low and high viscosity
- Dispense Accuracy ±0.1ml
- 175 ml capacity permits processing a full cassette of wafers without refilling
- Low hold-up volume(5.6 ml with 26 inches of dispense tubing)
- Depressurized between dispenses to prevent N2 absorption.
- Low cost
- Disposable cartridge liners eliminate crosscontamination
- Direct interface to Tractrix™ Compact Spin Track and SpinBall™ Process Station
- Interface available for other track systems
We provide “ESVG” (Enhanced SVG) 81- & 86-series track equipment. ESVG is your guarantee this SVG system includes the best of our designed and manufactured upgrades. Our ESVG products include enhanced: coater cup, drains, hot plate modules, sensors, electronic controls and more.
ESVG 81 & 86 Systems
We can provide rebuilt 8126, 8132, 8626, or 8632 series systems in our Santa Clara factory. Or, if you have a used or worn-out system, we can regenerate (refurbish and upgrade) it for you.
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