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Model

EZ4

EZ6

EZ8

AC200-S-PP

AC200-V

AC200-SE

AC200-PE

AC300-SE

IC5000

IC8000

Vacuum Chunk 

4''

6''

8''

8''

8''

8''

8''

12''

2''

2''

Speed range（rmp）

100-9999

100-12000

100-12000

20-10000

20-10000

20-10000

20-10000

20-5000

100-5000

100-8000

Acceleration range（rmp/s）

100-9999

100-30000

100-30000

10-50000

10-50000

10-50000

10-50000

10-10000

100-5000

100-8000

Speed accuracyRPM

±2

±2

±2

±2

±1

±1

±0.1

±1

±2

±2

Maximum single step size（s）

3000

3000

3000

3000

3000

3000

3000

3000

3000

3000

Temporal resolution

1

0.1

0.1

0.1

0.1

0.1

0.1

0.1

0.1

0.1

Multi step program settings

5 steps and 5 groups

10 steps and 10 groups

100 steps and 10groups

100 steps and 100groups

100 steps and 100groups

100 steps and 100groups

100 steps and 100groups

100 steps and 100groups

100 steps and 100groups

100 steps and 100groups

Automatic dispensing port

0

1

4

4

4

4

4

4

1

1

Rotary motor

BLDC

BLDC

BLDC

servo

servo

servo

servo

servo

BLDC

BLDC

inner chamber material

PA66

HDPE

HDPE

HDPE

HDPE

HDPE

HDPE

HDPE

HDPE

HDPE

• 24 VDC
• A 110 - 240 VAC to 24 VDC(50/60Hz) NRTL Certified power adapter for worldwide use is included.

• Heavy-duty Aluminum casting case to keep spinning stably
• 24VDC motor 
• Ar gas compatible for use in a glovebox

• The Chamber size is 134mm diameter, can accept wafer sample 4" diameter at Max.
• A 4" PTFE spin plate with the groove of 50x50mm is included, which can hold  50 sq mm, 0.3 mm thin sample plate in place during fast-spinning, so-called vacuumless holder
• 7 pcs of 0.3 mm thickness nylon plate is included for holding irregular samples with double-sided tape or carving, please watch the video for more details.
• One roll of 3M removable double-sided tape (3/4' W x 400" L) is included for immediate use 
• You may use a 50x50mm blank (included) plate to make different groove via a knife to fit your sample, or make an order space grooved plate from us. ( Pic. 2-3）
• You may order a wafer bonding tape to stick large substrate to the spin plate by clicking the pic. 4below:
• Pic. 1        Pic. 2      Pic. 3        Pic. 4

• Digital control panel with TWO programmable segments for different spin times and speeds
• Spinning speed: 500 - 8000 RPM  adjustable
• Spinning Time: 1 - 60s  adjustable

• One 20 mL syringe is included for liquid injection
• Support rod and swing-arm for the injector is included for easy coating
• The syringe holder height can be adjusted and rotated freely along the support rod

Using plasma cleaner to treat the substrate surface before the coating can improve the film quality

You may consider our new product: Heatable syringe (Click Pic 4 and Pic 5)

•  - Pic 1    - Pic 2    - Pic 3    - Pic 4     - Pic 5

• CE certificated only
• NRTL or CSA certification is available upon request at the extra cost

• One year limited with lifetime support
• Rusting and damage due to improper storage condition or maintenance are not covered by warranty

• In order to achieve optimal coating quality, please consider cleaning substrates by a plasma cleaner (click picture below for more details) prior to coating. This will significantly reduce the surface tension on the substrates.
• You may place the compact spin coater into a glove box to operate in inert gas 

• Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues that remain in the bow/base.

· 500 ~ 10000 RPM spinning speed programmable

· Accept substrate from 5 mm to 5" 

· PP chamber for anti-corrosive operation.

· One gas inlet port on top of the cover can fill inert gas during coating

· One 20ml Plastic Syringe is included

· The safety interlock is integrated into the lid

· Chamber size: 150 mm diameter

· 2 sets of PP anti-corrosive vacuum chucks with different sizes (O-ring ID Φ44mm, Φ10mm), which can hold substrate from 5 mm to  5" Dia.

· One 120L/min Oilless Vacuum Pump is included

· Vacuum-grade rubber pipe is included for immediate use.

· The digital control panel can store 12 programs and each program has 6 segments programmable for  speeds, acceleration, and spin duration

· Speed:  500 rpm - 10000 rpm programmable

· Duration up to 60 seconds for each segment

· Acceleration: 100 - 2000 rpm / sec adjustable

· Accuracy:   < 5%

· AC 220V · 1000 W total for the oilless pump and spin cater

· 24VDC high-speed motor

• Altitude:  ≤1000m
• Temperature: 25℃±15℃
• Humidity: 55%Rh±10%Rh

• A and B two sections of programs, each section contains six segments, and each section can repeat 500 times (for 1000 layers). 
• Spinning Speed: 500 ~ 10000 RPM adjustable (adjustment unit 1rpm )
• Z-axis stroke: 250mm
• Vacuum Chuck Size: 1", 2",  4" 
• PTFE heating cover, up to 1to 200ºC (be sure to use PTFE chuck for heating) 
• Pressure Range: -100 ~ 100kPa

• Total: 1200W
• Heating: 800W
• Input Voltage for Spin Coater and Peristaltic Pump: AC 110~220V, 50/60Hz (DC24 V converters included)
• Input Voltage for Temperature Controller: AC110V, 50/60Hz

• One 120L/min Oilless Vacuum Pump is included (either AC110V or 220 V can be used for vacuum function)
• For use in the Ar glove box, feedthrough is required at an extra cost for a vacuum pump connection.

• Two mini SS nozzles to dispense the liquid 
• Elevation lever to prevent dispensing liquid from drying

• One year limited with lifetime support

Coater: 450x400x580mm
Dispenser: 270x310x280mm