Product Description
Tractrix Spin Tool :
We provide the track products in the following areas:
The Tractrix™ tool is a stand alone, small-footprint track system designed for the spin deposition of photoresist, developer, polymer and other materials common to integrated circuit photolithography. Built with the philosop hy of "one controller for one track," the Tractrix™ tool is highly reliable. Its proprietary, single-axis linear transfer arm (LTA) will gently and efficiently transport substrates ranging from 2" to 200mm between the process modules.
Owing to its unique, efficient design, the Tractrix™ tool system is easier to operate and requires far less maintenance than any other track system utilizing multi-axis robotic transfer. The tool's flexibility makes it a low-cost solution for production, R&D, special applications, or as a backup system when other tracks are off-line for maintenance. Whether your process is g-line, i-line, DUV, low-k dielectric or something completely unique, the Tractrix™ tool system can be configured accordingly.
We also provide “ESVG” (Enhanced SVG) 81- & 86-series track equipment. ESVG is your guarantee this SVG system includes the best of our designed and manufactured upgrades. Our ESVG products include enhanced: coater cup, drains, hot plate modules, sensors, electronic controls and more.
ESVG 81 & 86 Systems
We can provide rebuilt 8126, 8132, 8626, or 8632 series systems in our Santa Clara factory. Or, if you have a used or worn-out system, we can regenerate (refurbish and upgrade) it for you.
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