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Vertical single door, inner size 1150*1200, Column chamber and flange is made of stainless steel.Baffle is made of stainless steel, 0.8mm thickness, easy to clean and maintain. Revolution and rotation 9 shafts. 8 multi-arc target (4 pieces on each side), material  , power 2kw 120w, multi-arc power source. Main valve DN-600 pneumatic baffle valve, made of carbon steel, which contains SMC electric controlling valve. Roughing valve DN-80 pneumatic baffle valve, made of carbon steel, which contains SMC electric controlling valve. Front valve DN-600 pneumatic baffle valve, made of carbon steel, which contains SMC electric controlling valve. All pipes are made of SUS304 stainless steel. Vacuum system includes KT-600 diffusion pump, heating power 9KW, 2X-70, durable, little libration, high vacuum and steady. Pumping speed 70 L/S, power 5.5KW, ZJP-300, durable, little libration, high vacuum and steady. Pumping speed 300 L/S, power 5.5KW, 2X-15, high pumping speed and steady. 10.4 inch touching screen and PLC. Fully automatic control. Main units include Schneider. 

Main products: vacuum coating equipment, vacuum coating machine, vacuum plastic coater, vacuum plating machine, magnetron sputtering, optics coater