| Model: | XD106 |
|---|---|
| Brand: | CoreMorrow |
| Origin: | Made In China |
| Category: | Industrial Supplies / Other Industrial Supplies |
| Label: | piezo stage , piezo actuator , nanopositioning |
| Price: |
US $8000
/ pc
|
| Min. Order: | 1 pc |
| Live Chat: |  | Last Online:18 Apr, 2024 |
Characteristics
• Low Temperature Vacuum-compatible Non-Magnetic • XYZ motion • With aperture • Open-loop motion control
Applications
• Semiconductor processing • Semiconductor inspection • High precision testing and operation
• Other nano motion control that requires vacuum and non-magnetic requirements, etc.
| Technical Data | |||||
|
Type |
XD106.XYZ200K |
Units |
|||
|
Active axes |
X、Y、Z |
|
|||
|
Nominal travel(0~150V) |
XY200, Z100 |
μm±10%, room temperature |
|||
|
Travel(0~150V) |
XY80, Z50 |
μm±10%, 100K tempreture |
|||
|
Resolution |
2 |
nm |
|||
|
Unloaded reseonant frequency |
X180/Y180/Z250 |
Hz±20% |
|||
|
Reseonant frequency @ 200g |
X140/Y140/Z200 |
Hz±20% |
|||
|
El.capacitance |
XY3.6, Z7.2 |
μF±20% |
|||
|
Material |
Titanium |
|
|||
|
Load capacity |
700 |
g |
|||
|
Mass |
1360 |
g±5% |
|||
