Semiconductor equipment welded bellows
Product Description
1.Item: Semiconductor equipment welded bellows
2.Vacuum Leak Ratio: 1*10-4Pa·L/S~1* 10-7Pa·L/S
3.Use Temperature: -251~450°C
4.Compression Ratio: 80%
5.Service Life: 10~100Hz
6.Material: SUS 316L or SUS 304
7.Size: Design according to customers' requirement
8.Usage: Mainly used for semiconductor equipment and automation equipment
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