| Model: | SRC-1800 |
|---|---|
| Brand: | Vakia |
| Origin: | Made In China |
| Category: | Industrial Supplies / Machinery / Pumps Vacuum Equipment |
| Label: | Superhard Coating Ma , Plastic Coating M/C , evaporation machine |
| Price: |
US $73548
/ pc
|
| Min. Order: | 1 pc |
| Live Chat: | Last Online:08 Aug, 2013 |
| Model
Function |
VAKIA
-SRC -900 |
VAKIA
-SRC -1000 |
VAKIA
-SRC -1200 |
VAKIA
-SRC -1400 |
VAKIA
-SRC -1500 |
VAKIA
-SRC -1800 |
| Vacuum Chamber
Inner Size |
φ 900
*H1100 mm |
φ 1000
*H1200 mm |
φ 1200
*H1500 mm |
φ 1400
*H1800 mm |
φ 1500
*H1900 mm |
φ 1800
*H2000 mm |
| Power Supply Type | Resistance Evaporation Power Supply, Ion bombardment Power
Supply, Pulse Bias Power Supply, Direct Current magnetron power Supply, Medium Frequency Magnetron Power Supply |
|||||
| Structure of Vacuum Chamber | Vertical Double Door, Vertical Single Door, Horizontal Single Door, Back Vacuum Acquisition System | |||||
| Material of Vacuum Chamber | Superior Stainless Steel Chamber | |||||
| Ultimate Vacuum | 8.0× 10 -4 Pa | |||||
| Pump-out Time(no-load)
|
From air to 5.0× 10 -2 Pa≤ 8min | |||||
| Vacuum Acquisition
System |
Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according customer’ s demand) | |||||
| Coating Style | Evaporation coating+magnetron sputtering coating | |||||
| Kinds of Film | metal film, semi-transparent film, Non conductive vacuum metallization film
Electromagnetic Interference film, Dielectric film |
|||||
| The Style of Magnetron target | Rectangle magnetron target, cylindrical magnetron target, twin magnetron dual target
|
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| Power of
Magnetron bias power supply and the number of magnetron target |
The appropriate equipment is selected according to demanders’ requirements and different techniques | |||||
| Work Piece
Rotation maximum valid diameter |
6 axis
φ 260mm |
6 axis
φ 280mm |
6 axis
φ 360mm 8 axis φ 280mm |
6 axis
φ 420mm 8 axis φ 350mm |
6 axis
φ 460mm 8 axis φ 380mm |
6 axis
φ 560mm 8 axis φ 460mm |
| Evaporation electrode | Standard configure 2 pair | |||||
| Evaporation Power | 15KW | 15KW | 20KW | 25 KW | 30KW | 35KW |
| Total Power | 50KW | 50KW | 65KW | 85 KW | 100KW | 135KW |
| Process Gas | Two or three process gas flow control and display system, select automatic filling system | |||||
| Cooling System | Water-cooling circulatory system, cooling water tower or industrial cooling water machine is also needed(which are supplied by demander) | |||||
| Work Piece
Rotating Stand and Rotating Style |
Planetary revolution-autorotation and frequency conversion speed regulation
(controlled and adjustable) |
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| Control Mode | Automatic and Manual operation modes integrated, touch screen, PLC or computer control | |||||
| Alarm and
Protection |
It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection. It can carries out protective measurements and has the function of interlock. | |||||
| Cover Area | W3m× L3m | W3m× L3m | W3.5m× L4m | W5m× L5m | W6m× L6m | W6m× L8m |
| Other Technical
parameters |
Water pressure≥ 0.2MPa, water temperature≤ 25º C, gas pressure0.5-0.8MPa | |||||
| Remark | Designed flexible and select the appropriate equipment according to
demanders’ requirements |
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| Payment Terms: | The demander should pay 40% deposit upon sign the contract, and pay the balance before shipment with the goods qualified and accepted. |
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