octafluorocyclobutane/C4F8
Product Description
Purity: 99.999%
Oxygen: 1ppmv
Air: 3ppmv
Water: 3ppmv
Other Organics: 10ppmv
Acidity as HF: 0.1ppmv
Application
In the production semiconductor materials and devices, octafluorocyclobutane serves as a deposition gas and etchant.
It has also been investigated as a refrigerant in specialised applications, as a replacement for ozone depleting chlorofluorocarbon refrigerants.
Exploiting its volatility and chemical inertness, octafluorocyclobutane may be found in some aerosolized foods. It is listed by the Codex Alimentarius under number E946.
It is investigated as a possible replacement for sulfur hexafluoride as a dielectric gas.
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