| 4" polished wafer |
| Diameter: 100 -/+ 0.5mm |
| Orientation: <111> -/+ 0.5 and <100> -/+ 0.5 |
| Flat width: cw32.5 -/+ 2.5mm |
| Thickness: 525μm +/-25um |
| TTV: <5μm |
| Finish: Single Side Polished |
| Resistivity(Ω·m): 0.001-60 ohm-cm for both P&N type |
| RRG(C-6MM): ≤20%(N type), ≤10%(P type) |
| LPDs: <10@.3UM |
| Bow: <40UM |
| Packing: 25 ea per cassette - inner clear bag; outer Alum bag. |
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