Product Description
| 5" lapped wafer |
| Diameter: 125 -/+ 0.5mm |
| Orientation: <111> -/+ 0.5 and <100> -/+ 0.5 |
| Flat width: cw42.5 -/+ 2.5mm |
| Thickness: >=250μm |
| THK deviation: -/+ 5μm |
| TTV: <5μm |
| Resistivity(Ω·m): 0.001-60 ohm-cm for both P&N type |
| RRG(C-6MM): ≤20%(N type), ≤10%(P type) |
| Oxygen Concent(ASTM-79): 20-36ppma |
| Carbon Concent: ≤1ppma, ≤5% |
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