Ferrofluid-based seals / feedthroughs
Product Description
The simplest traditional ferrofluid-based seals construction consists of a ring permanent magnet 4 and two poles 1 on working surfaces of which circular teeth are located. Magnetic flow excited by the magnet 4, hold ferrofluid 3 in the working gap between fixed poles 1 and moving shaft 2, ensuring its hermetic sealing in relation to the fixed casing 5. Static gaps are sealed with fillers 6.
Ferrofluid-based seals manufactured by FerroLabs, Inc. offer a number of advantages in comparison to conventional seals:
* ensure absolute hermeticity, including in corrosive, toxic, and hazardous substance environments (helium leakage less than 10-12 m3Pa/s);
* endure significant pressure fluctuations (up to 10atm) both in static and dynamic modes while intrinsic friction losses remain small;
* high reliability with an operating life up to 15 years;
* have simple configuration and are easy to manufacture.
APPLICATION:
SEMICONDUCTOR MANUFACTURING
* FFS for growth equipment
* FFS for coating application units (CVD, PVD, PECVD, MOCVD, etc.)
VACUUM AND GAS TECHNOLOGICAL EQUIPMENT
* FFS for coating application units (CVD, PVD, PECVD, MOCVD, etc)
* FFS for gas lasers
* FFS for electron-beam welding units
* FFS for plasma units
EQUIPMENT WITH STIRRING DEVICES
* FFS for bioreactors\fermentors
* FFS for chemical reactors
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