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     MEMS Technical Mass Flow Sensor FS4001 

Features :

Low mass flow range from 0-30 sccm up to 0-1000sccm 

Outstanding accuracy of ± 1.5% 

Fast response (4 ms selectable )

Pressure rating up to 5 bar (73 psi ) 

Analog and /or digital user interface 

Easy installation 

Application : 

Industrial & medical 

Specfication :

Description 

The FS4001 mass flow sensors are manufactured using Siargo’s proprietary MEMS flow sensor and package technology. The sensors are specially designed for low flow rate range applications from 0 ~30 sccm up to 0 ~ 1000 sccm.

The maximum flow rate for each model is manufactured via specially designed package as well as smart electronics so that the optimal sensitivity would be achieved.

The packaging enclosure is made of the chemically inert and thermally stable polycarbonate material.

The maximum over pressure rating is 5 bar (73 psi) that is benefitted from Siargo’s unique MEMS sensor chip structure, special packaging technology and the r ed sensor housing

The FS4001 can be used in a wide range of applications including instrumentation (e.g. GC mass spectrometry), leak detection, process control, gas flow metrology as well as medical applications.

The FS4001 requires a power supply of 8 ~ 24 Vdc and provides an analog and/or digital user interface.

The analog output is linearized from 0.5 to 4.5 Vdc corresponding with flow rate from 0 to full scale.

The digital output is via RS232.

The communication protocol of the RS232 can be found in this manual.

The calibration is generally performed with nitrogen at 20 °C and 101.325 kPa pressure rating. It can nonetheless be calibrated with other gases and conditions upon requests

Any questions or needs ,pls feel free to contact us .