| Model: | JS401 |
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| Brand: | Jaesung Engineering Co. |
| Origin: | Made In Korea |
| Category: | Electronics & Electricity / Other Electrical & Electronic |
| Label: | - |
| Price: |
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| Min. Order: | 1 pc |
| Live Chat: | Last Online:30 Dec, 2017 |
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Spin coater, JS401 Specification Programmable 20 steps, 20 recipes stored |
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PLC and Touch panel operation |
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Acuracy +- 1 RPM |
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Max RPM: 6,000 |
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Programmable Acceleration: 1,000RPM/sec. 20,000RPM/ sec. without load |
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SUS304 body and bowl for easy cleaning and chemical resistance |
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Drain port |
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Clear PC cover for bowl |
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Max 100~200mm diameter wafer |
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Standard simultaneous dispense capability expanded upto 4 units(w/ pressure tanks)
Photoresist, EBR, HMDS, BSR or Developing |
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Standard dry vacuum pump: 100 liter/ min, 0.5 ATM |
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Standard sample chuck |
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Dimension K00W x K00D x 275H mm |
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220VAC, 60Hz, 5 amp |
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Weight: Kg |
