wafer side length & side length tolerant variation
125±0.5mm
diagonal(diameter)& diagonal(diameter)variation
150±0.5 mm
angularity≤50μm
total thickness variation(TTV):<30μm
11
Surface quality
surface gaps width≤0.5mm,surface gaps’ quantity per pc≤2C,surface gaps range less than 3mm
no cracks, no holes ,“V” shape gaps are not allowed
surface damage layer(saw traces)≤15μm,the handle is not marked
Clean and free from staining, free from scratches and cracks.
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